arXiv:2409.16637eess.IVcs.CV2024-09

用深度学习提升电子显微镜图像中纳米颗粒识别精度,有效抑制噪声干扰。

Deep-Learning Recognition of Scanning Transmission Electron Microscopy: Quantifying and Mitigating the Influence of Gaussian Noises

  • 采用Mask R-CNN模型自动识别STEM图像中的纳米颗粒并进行尺寸分析。
  • 高斯噪声显著降低识别准确率,滤波后精度明显提升。
  • 适用于复杂结构与大数据量的材料分析,适合科研与工业界使用。

扫描透射电子显微镜(STEM)能以原子级空间分辨率和毫秒级时间分辨率揭示材料形貌与结构,生成大量高清数据,推动了科学与工业领域的广泛关注。然而,海量数据的手动处理耗时且难以实现,亟需自动化方法。本文提出基于掩码区域卷积神经网络(Mask R-CNN)的深度学习模型,用于识别STEM-HAADF图像中的纳米颗粒,并实现关联尺寸分析。该模型在不同高斯噪声、颗粒形状和大小的模拟数据上测试,结果显示高斯噪声对识别精度有决定性影响。通过引入高斯滤波与非局部均值滤波,显著缓解噪声干扰,大幅提升识别准确率。该方法进一步应用于真实实验数据,表现优于传统阈值法,验证了其在复杂结构与大规模数据处理中的潜力。

原文摘要 · Abstract (English)

Scanning transmission electron microscopy (STEM) is a powerful tool to reveal the morphologies and structures of materials, thereby attracting intensive interests from the scientific and industrial communities. The outstanding spatial (atomic level) and temporal (ms level) resolutions of the STEM techniques generate fruitful amounts of high-definition data, thereby enabling the high-volume and high-speed analysis of materials. On the other hand, processing of the big dataset generated by STEM is time-consuming and beyond the capability of human-based manual work, which urgently calls for computer-based automation. In this work, we present a deep-learning mask region-based neural network (Mask R-CNN) for the recognition of nanoparticles imaged by STEM, as well as generating the associated dimensional analysis. The Mask R-CNN model was tested on simulated STEM-HAADF results with different Gaussian noises, particle shapes and particle sizes, and the results indicated that Gaussian noise has determining influence on the accuracy of recognition. By applying Gaussian and Non-Local Means filters on the noise-containing STEM-HAADF results, the influences of noises are largely mitigated, and recognition accuracy is significantly improved. This filtering-recognition approach was further applied to experimental STEM-HAADF results, which yields satisfying accuracy compared with the traditional threshold methods. The deep-learning-based method developed in this work has great potentials in analysis of the complicated structures and large data generated by STEM-HAADF.

电子显微深度学习图像识别噪声抑制

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