arXiv:2410.08291physics.opticseess.IV2024-10被引 1

提出无偏斜率建模方法,提升自由曲面高频频段形状重建精度。

Zonal shape reconstruction for Shack-Hartmann sensors and deflectometry

  • 构建不依赖点导数假设的无偏斜率数据模型
  • 在模拟与实验中降低总形状误差,尤其提升高频成分还原能力
  • 适合高精度光学制造中的自由曲面检测场景

Shack-Hartmann、 deflectometry 和条纹投影轮廓测量等光学测量手段通过斜率间接获取表面形貌。其中,具有大量自由度的区域形状重建方法被广泛使用,但其性能受限于形状估计误差。现有方法多基于Fried和Southwell经典模型,假设斜率测量为点导数,这会引入偏差并强制特定基函数选择。本文首先分析这些模型的局限性,指出点导数假设导致估计偏差且基函数受限。随后提出一种无偏的数据形成模型,摆脱基函数选择限制。进一步采用正则化最大后验(MAP)重建,并在模拟和实验数据上对比现有最优的Southwell与Fried模型。结果表明,新方法在自由曲面的高频率成分重建中显著降低总形状误差。

原文摘要 · Abstract (English)

Some metrological means, such as Shack-Hartmann, deflectometry sensors or fringe projection profilometry, measure the shape of an optical surface indirectly from slope measurements. Zonal shape reconstruction, a method to reconstruct shape with a high number of degrees of freedom, is used for all of these applications. It has risen in interest with the use of deflectometers for the acquisition of high resolution slope data for optical manufacturing, especially because shape reconstruction is limiting in terms of shape estimation error. Zonal reconstruction methods all rely on the choice of a data formation model, a basis on which the shape will be decomposed, and an estimator. In this paper, we first study the canonical Fried and Southwell models of the literature and analyze their limitations. We show that modeling the slope measurement by a point-wise derivative as they both do can induce a bias on the shape estimation, and that the bases on which the shape is decomposed are imposed because of this assumption. In the second part of this paper, we propose to build an unbiased model of the data formation, without constraints on the choice of the decomposition basis. We then compare these models to the canonical models of Fried and Southwell. Lastly, we perform a regularized MAP reconstruction, and compare the performance in terms of total shape error of this method to the state of the art for the Southwell and Fried models, first by simulation, then on experimental data. We demonstrate that the suggested method outperforms the canonical models in terms of total shape reconstruction error on a deflectometry measurement of the high-frequency content of a freeform mirror.

光学测量形状重建自由曲面无偏建模

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