用递归优化网络检测激光芯片上微米级隐形划痕,提升良品率。
Non-Destructive Detection of Sub-Micron Imperceptible Scratches On Laser Chips Based On Consistent Texture Entropy Recursive Optimization Semi-Supervised Network
- 基于递归优化架构,利用无标签数据增强训练信号。
- 在未标注数据下实现75.6%准确率与74.8%召回率。
- 适合半导体制造中高精度缺陷检测场景。
激光芯片是半导体激光器的核心部件,在多个行业广泛应用,具有广阔前景。发射面的光滑度对芯片性能至关重要,即使不可见的划痕也会显著降低器件性能与寿命,影响生产效率和良率。因此,非破坏性检测发射面上的亚微米级隐形划痕对提升良率、降低成本至关重要。这类划痕在背景中几乎不可见,传统方法难以识别,且缺乏标注数据。为此,本文提出TexRecNet——一种基于一致性纹理熵递归优化的半监督网络。该网络采用递归优化结构,通过前一轮输出指导下一轮输入与位置编码,逐步提升划痕边缘检测精度。同时引入图像纹理熵,利用大量未标注数据扩充训练集,维持训练信号可靠性。通过分析递归过程中输出序列的一致性,提出带有递归一致性约束的半监督训练策略,以递归输出实现非破坏性信号增强,并一致优化损失函数,实现高效端到端训练。实验表明,该方法在大量无监督数据支持下,检测隐形划痕的准确率达到75.6%,召回率为74.8%,较传统Unet分别提升8.5%和33.6%,显著提升激光芯片质量控制水平。
原文摘要 · Abstract (English)
Laser chips, the core components of semiconductor lasers, are extensively utilized in various industries, showing great potential for future application. Smoothness emitting surfaces are crucial in chip production, as even imperceptible scratches can significantly degrade performance and lifespan, thus impeding production efficiency and yield. Therefore, non-destructively detecting these imperceptible scratches on the emitting surfaces is essential for enhancing yield and reducing costs. These sub-micron level scratches, barely visible against the background, are extremely difficult to detect with conventional methods, compounded by a lack of labeled datasets. To address this challenge, this paper introduces TexRecNet, a consistent texture entropy recursive optimization semi-supervised network. The network, based on a recursive optimization architecture, iteratively improves the detection accuracy of imperceptible scratch edges, using outputs from previous cycles to inform subsequent inputs and guide the network's positional encoding. It also introduces image texture entropy, utilizing a substantial amount of unlabeled data to expand the training set while maintaining training signal reliability. Ultimately, by analyzing the inconsistency of the network output sequences obtained during the recursive process, a semi-supervised training strategy with recursive consistency constraints is proposed, using outputs from the recursive process for non-destructive signal augmentation and consistently optimizes the loss function for efficient end-to-end training. Experimental results show that this method, utilizing a substantial amount of unsupervised data, achieves 75.6% accuracy and 74.8% recall in detecting imperceptible scratches, an 8.5% and 33.6% improvement over conventional Unet, enhancing quality control in laser chips.
Thank you to arXiv for use of its open access interoperability. PaperDance 不是 arXiv 官方产品;中文卡片由大模型生成,请以原文为准。