用贝叶斯物理信息神经网络加速电磁迁移后空洞阶段的随机分析。

In contrast to the assumptions of most existing Electromigration (EM) analysis tools, the evolution of EM-induced stress is inherently non-deterministic, influenced by factors such as input current fluctuations and manufacturing non-idealities. Traditional approaches for estimating stress variations typically involve computationally expensive and inefficient Monte Carlo simulations with industrial solvers, which quantify variations using mean and variance metrics. In this work, we introduce a novel machine learning-based framework, termed BPINN-EM- Post, for efficient stochastic analysis of EM-induced post-voiding aging processes. For the first time, our new approach integrates closed-form analytical solutions with a Bayesian Physics- Informed Neural Network (BPINN) framework to accelerate the analysis. The closed-form solutions enforce physical laws at the individual wire segment level, while the BPINN ensures that physics constraints at inter-segment junctions are satisfied and stochastic behaviors are accurately modeled. By reducing the number of variables in the loss functions through utilizing analytical solutions, our method significantly improves training efficiency without accuracy loss and naturally incorporates variational effects. Additionally, the analytical solutions effectively address the challenge of incorporating initial stress distributions in interconnect structures during post-void stress calculations. Numerical results demonstrate that BPINN-EM-Post achieves over 240x and more than 67x speedup compared to Monte Carlo simulations using the FEM-based COMSOL solver and FDM-based EMSpice, respectively, with marginal accuracy loss.