构建视觉语言过程奖励模型评测基准，揭示当前模型在复杂推理中的局限性。

Process-supervised reward models serve as a fine-grained function that provides detailed step-wise feedback to model responses, facilitating effective selection of reasoning trajectories for complex tasks. Despite its advantages, evaluation on PRMs remains less explored, especially in the multimodal domain. To address this gap, this paper first benchmarks current vision large language models (VLLMs) as two types of reward models: output reward models (ORMs) and process reward models (PRMs) on multiple vision-language benchmarks, which reveal that neither ORM nor PRM consistently outperforms across all tasks, and superior VLLMs do not necessarily yield better rewarding performance. To further advance evaluation, we introduce ViLBench, a vision-language benchmark designed to require intensive process reward signals. Notably, OpenAI's GPT-4o with Chain-of-Thought (CoT) achieves only 27.3% accuracy, indicating the benchmark's challenge for current VLLMs. Lastly, we preliminarily showcase a promising pathway towards bridging the gap between general VLLMs and reward models -- by collecting 73.6K vision-language process reward data using an enhanced tree-search algorithm, our 3B model is able to achieve an average improvement of 3.3% over standard CoT and up to 2.5% compared to its untrained counterpart on ViLBench by selecting OpenAI o1's generations. We release the implementations at https://ucsc-vlaa.github.io/ViLBench with our code, model, and data.