用自监督预训练提升微电子缺陷检测的视觉变压器性能。

While transformers have surpassed convolutional neural networks (CNNs) in various computer vision tasks, microelectronics defect detection still largely relies on CNNs. We hypothesize that this gap is due to the fact that a) transformers have an increased need for data and b) (labelled) image generation procedures for microelectronics are costly, and data is therefore sparse. Whereas in other domains, pre-training on large natural image datasets can mitigate this problem, in microelectronics transfer learning is hindered due to the dissimilarity of domain data and natural images. We address this challenge through self pre-training, where models are pre-trained directly on the target dataset, rather than another dataset. We propose a resource-efficient vision transformer (ViT) pre-training framework for defect detection in microelectronics based on masked autoencoders (MAE). We perform pre-training and defect detection using a dataset of less than 10,000 scanning acoustic microscopy (SAM) images. Our experimental results show that our approach leads to substantial performance gains compared to a) supervised ViT, b) ViT pre-trained on natural image datasets, and c) state-of-the-art CNN-based defect detection models used in microelectronics. Additionally, interpretability analysis reveals that our self pre-trained models attend to defect-relevant features such as cracks in the solder material, while baseline models often attend to spurious patterns. This shows that our approach yields defect-specific feature representations, resulting in more interpretable and generalizable transformer models for this data-sparse domain.