非接触式电感传感实现高精度六维力矩测量，适合精密机器人
A Novel 6-axis Force/Torque Sensor Using Inductance Sensors
- 用导体位移的非接触电感法测力，避免传统应变片缺陷
- 采样率高达4kHz，分辨率0.03N，量化级超5.5万步，优于商用产品
- 集成信号处理模块，结构紧凑，适合对体积和抗干扰要求高的场景
本文提出一种基于电感传感技术的新型六维力/力矩（F/T）传感器。与需直接接触和外部放大器的传统应变片传感器不同，该传感器通过非接触方式测量导体目标的位移来估计力。通过将基于CAN-FD的信号处理模块直接集成在PCB上，实现了无需外部数据采集系统即可高达4kHz的高速数据采集。采用有理函数拟合方法对传感机制进行建模与校准，在均方根误差（RMSE）、决定系数（R²）和线性误差方面均优于其他非线性模型。静态与重复性实验验证了传感器的高精度，分辨率达0.03~N，量化级超过55,000步，优于商用传感器。该传感器还表现出低串扰、高灵敏度和强抗噪能力。其性能与结构使其适用于对小型化、非接触操作及集成化处理有要求的精密机器人应用场景。
原文摘要 · Abstract (English)
This paper presents a novel six-axis force/torque (F/T) sensor based on inductive sensing technology. Unlike conventional strain gauge-based sensors that require direct contact and external amplification, the proposed sensor utilizes non-contact inductive measurements to estimate force via displacement of a conductive target. A compact, fully integrated architecture is achieved by incorporating a CAN-FD based signal processing module directly onto the PCB, enabling high-speed data acquisition at up to 4~kHz without external DAQ systems. The sensing mechanism is modeled and calibrated through a rational function fitting approach, which demonstrated superior performance in terms of root mean square error (RMSE), coefficient of determination ($R^2$), and linearity error compared to other nonlinear models. Static and repeatability experiments validate the sensor's accuracy, achieving a resolution of 0.03~N and quantization levels exceeding 55,000 steps, surpassing that of commercial sensors. The sensor also exhibits low crosstalk, high sensitivity, and robust noise characteristics. Its performance and structure make it suitable for precision robotic applications, especially in scenarios where compactness, non-contact operation, and integrated processing are essential.
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