无需重训练,用轻量反向模型快速优化半导体工艺参数
Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond
- 用轻量反向模型迭代搜索最优输入,不改动预训练模型
- 五次迭代内达成目标工艺配方,优于贝叶斯优化和人工专家
- 适用于芯片制造、化工、电子封装等复杂场景,抗干扰强
我们提出模型反馈学习(MFL),一种无需重训练即可优化预训练AI模型或已部署硬件系统输入的测试时优化框架。与依赖调整模型参数的方法不同,MFL利用轻量级反向模型,通过迭代搜索最优输入,在部署约束下实现高效适应。该方法在半导体等离子体刻蚀任务中仅需五次迭代即可生成目标工艺配方,显著优于贝叶斯优化和人类专家。此外,MFL在化学气相沉积等化工过程及引线键合等电子系统中也表现优异,验证了其广泛适用性。通过引入稳定性感知优化,MFL在高维控制场景下对工艺波动更具鲁棒性,超越传统监督学习与随机搜索。MFL实现了少样本自适应,为真实环境中智能控制部署提供了一种可扩展、高效的范式。
原文摘要 · Abstract (English)
We introduce Model Feedback Learning (MFL), a novel test-time optimization framework for optimizing inputs to pre-trained AI models or deployed hardware systems without requiring any retraining of the models or modifications to the hardware. In contrast to existing methods that rely on adjusting model parameters, MFL leverages a lightweight reverse model to iteratively search for optimal inputs, enabling efficient adaptation to new objectives under deployment constraints. This framework is particularly advantageous in real-world settings, such as semiconductor manufacturing recipe generation, where modifying deployed systems is often infeasible or cost-prohibitive. We validate MFL on semiconductor plasma etching tasks, where it achieves target recipe generation in just five iterations, significantly outperforming both Bayesian optimization and human experts. Beyond semiconductor applications, MFL also demonstrates strong performance in chemical processes (e.g., chemical vapor deposition) and electronic systems (e.g., wire bonding), highlighting its broad applicability. Additionally, MFL incorporates stability-aware optimization, enhancing robustness to process variations and surpassing conventional supervised learning and random search methods in high-dimensional control settings. By enabling few-shot adaptation, MFL provides a scalable and efficient paradigm for deploying intelligent control in real-world environments.
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