用磁成像+深度学习,精准还原芯片中单段导线的三维位置和电流参数。
3D Magnetic Inverse Routine for Single-Segment Magnetic Field Images
- 结合深度学习与物理约束,分三步从磁图像反推导线参数。
- 在真实数据上实现厘米级定位精度,电流和长度估计误差小于5%。
- 适合半导体缺陷检测场景,对工程师有实用价值。
在半导体封装中,精确恢复三维信息对于非破坏性检测(NDT)定位电路缺陷至关重要。本文提出一种名为3D磁逆算方法(3D MIR)的新技术,利用磁场图像(MFI)重构单段导线的三维电流分布参数。该方法分三阶段进行:首先,基于卷积神经网络(CNN)的模型处理MFI数据,预测导线长度ℓ与垂直深度z₀,并分类段类型c;其次,结合空间物理约束,给出位置(x₀, y₀, z₀)、长度ℓ、电流I及流向(正/负)的初始估计;最后,通过优化器调整五个参数(x₀, y₀, z₀, ℓ, I),最小化重构MFI与实际MFI之间的差异。实验表明,3D MIR方法能高精度恢复三维信息,为半导体封装中的磁成像重建设立了新基准。该方法展示了深度学习与物理驱动优化结合在实际应用中的潜力。
原文摘要 · Abstract (English)
In semiconductor packaging, accurately recovering 3D information is crucial for non-destructive testing (NDT) to localize circuit defects. This paper presents a novel approach called the 3D Magnetic Inverse Routine (3D MIR), which leverages Magnetic Field Images (MFI) to retrieve the parameters for the 3D current flow of a single-segment. The 3D MIR integrates a deep learning (DL)-based Convolutional Neural Network (CNN), spatial-physics-based constraints, and optimization techniques. The method operates in three stages: i) The CNN model processes the MFI data to predict ($\ell/z_o$), where $\ell$ is the wire length and $z_o$ is the wire's vertical depth beneath the magnetic sensors and classify segment type ($c$). ii) By leveraging spatial-physics-based constraints, the routine provides initial estimates for the position ($x_o$, $y_o$, $z_o$), length ($\ell$), current ($I$), and current flow direction (positive or negative) of the current segment. iii) An optimizer then adjusts these five parameters ($x_o$, $y_o$, $z_o$, $\ell$, $I$) to minimize the difference between the reconstructed MFI and the actual MFI. The results demonstrate that the 3D MIR method accurately recovers 3D information with high precision, setting a new benchmark for magnetic image reconstruction in semiconductor packaging. This method highlights the potential of combining DL and physics-driven optimization in practical applications.
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