arXiv:2509.16431cs.AI2025-09被引 2

用AI预测芯片制造异常,提前预警减少停机

Proactive Statistical Process Control Using AI: A Time Series Forecasting Approach for Semiconductor Manufacturing

  • 用Facebook Prophet预测时序数据,提前识别风险
  • 在不规则采样数据下仍实现高精度风险分类
  • 适合需要预防性维护的高端制造场景

在制造业中,保持设备和流程稳定运行至关重要。传统统计过程控制(SPC)仅在问题发生后才发出警报,导致材料浪费和停机。本文提出一种基于AI的主动式SPC方法,利用Facebook Prophet模型对时间序列数据进行预测,并结合SPC规则判断未来测量值处于安全、警告或临界状态。该方法应用于某半导体制造公司的实际数据,尽管数据采样间隔不规则,模型仍能准确预测并分类风险等级。系统使工程师可在故障发生前采取行动,显著降低意外停机风险,提升生产稳定性与可靠性。通过融合机器学习与传统SPC,实现了更主动、精准的质量控制。

原文摘要 · Abstract (English)

In the manufacturing industry, it is very important to keep machines and processes running smoothly and without unexpected problems. One of the most common tools used to check if everything is working properly is called Statistical Process Control (SPC). Traditional SPC methods work by checking whether recent measurements are within acceptable limits. However, they only react after a problem has already occurred. This can lead to wasted materials, machine downtime, and increased costs. In this paper, we present a smarter way to use SPC. Instead of just reacting to issues after they happen, our system can predict future problems before they occur. We use a machine learning tool called Facebook Prophet, which is designed to work with time-series data (data that changes over time). Prophet looks at past data and forecasts what the next value will be. Then, we use SPC rules to decide if the predicted value is in a Safe zone (no problem), a Warning zone (needs attention), or a Critical zone (may require shutting down the process). We applied this system to real data from a semiconductor manufacturing company. One of the challenges with this data is that the measurements are not taken at regular time intervals. This makes it harder to predict future values accurately. Despite this, our model was able to make strong predictions and correctly classify the risk level of future measurements. The main benefit of our system is that it gives engineers and technicians a chance to act early - before something goes wrong. This helps reduce unexpected failures and improves the overall stability and reliability of the production process. By combining machine learning with traditional SPC, we make quality control more proactive, accurate, and useful for modern industry.

制造优化时间序列AI预警半导体

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