为视觉语言模型设计细粒度推理链评估，提升推理质量与训练效果。

Chain of thought reasoning has demonstrated remarkable success in large language models, yet its adaptation to vision-language reasoning remains an open challenge with unclear best practices. Existing attempts typically employ reasoning chains at a coarse-grained level, which struggles to perform fine-grained structured reasoning and, more importantly, are difficult to evaluate the reward and quality of intermediate reasoning. In this work, we delve into chain of step reasoning for vision-language models, enabling assessing reasoning step quality accurately and leading to effective reinforcement learning and inference-time scaling with fine-grained rewards. We present a simple, effective, and fully transparent framework, including the step-level reasoning data, process reward model (PRM), and reinforcement learning training. With the proposed approaches, our models set strong baselines with consistent improvements on challenging vision-language benchmarks. More importantly, we conduct a thorough empirical analysis and ablation study, unveiling the impact of each component and several intriguing properties of inference-time scaling. We believe this paper serves as a baseline for vision-language models and offers insights into more complex multimodal reasoning. Our dataset, PRM, and code will be available at https://github.com/baaivision/CoS.