arXiv:2510.20339physics.app-phcs.AI2025-10被引 1

用深度学习同时预测表面纹理参数和不确定度,支持仪器选型决策。

Multi-Task Deep Learning for Surface Metrology

  • 多任务框架联合回归纹理参数与不确定度,引入分位数与异方差头建模不确定性。
  • 单目标模型在Ra、Rz、RONt预测上R²超0.98,不确定度预测也达0.99以上,除RONt_uncert外均表现优异。
  • 结果经校准后可用于实际测量流程中的仪器选择与验收,适合工业计量场景使用。

本文提出一种可复现的深度学习框架,用于表面计量学中同时预测表面纹理参数及其报告的标准不确定度。基于涵盖触觉与光学系统的多仪器数据集,该方法解决了测量系统类型分类问题,并协同回归Ra、Rz、RONt及其对应的不确定度目标(Ra_uncert、Rz_uncert、RONt_uncert)。通过分位数与异方差头部建模不确定度,并采用事后共形校准生成校准区间。在独立测试集上,单目标回归器取得高保真度:Ra(R²=0.9824)、Rz(R²=0.9847)、RONt(R²=0.9918)表现优异;两个不确定度目标也良好拟合(Ra_uncert R²=0.9899,Rz_uncert R²=0.9955),但RONt_uncert仍较困难(R²=0.4934)。分类器准确率达92.85%,温度缩放后概率校准基本不变(ECE从0.00504降至0.00503)。朴素多输出主干出现负迁移,单目标模型表现更优。结果提供可校准的预测,适用于计量工作流中的仪器选择与接受决策。

原文摘要 · Abstract (English)

A reproducible deep learning framework is presented for surface metrology to predict surface texture parameters together with their reported standard uncertainties. Using a multi-instrument dataset spanning tactile and optical systems, measurement system type classification is addressed alongside coordinated regression of Ra, Rz, RONt and their uncertainty targets (Ra_uncert, Rz_uncert, RONt_uncert). Uncertainty is modelled via quantile and heteroscedastic heads with post-hoc conformal calibration to yield calibrated intervals. On a held-out set, high fidelity was achieved by single-target regressors (R2: Ra 0.9824, Rz 0.9847, RONt 0.9918), with two uncertainty targets also well modelled (Ra_uncert 0.9899, Rz_uncert 0.9955); RONt_uncert remained difficult (R2 0.4934). The classifier reached 92.85% accuracy and probability calibration was essentially unchanged after temperature scaling (ECE 0.00504 -> 0.00503 on the test split). Negative transfer was observed for naive multi-output trunks, with single-target models performing better. These results provide calibrated predictions suitable to inform instrument selection and acceptance decisions in metrological workflows.

表面计量多任务学习不确定性估计深度学习

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