综述微型麦克风扬声器技术，解析其在音频应用中的潜力与挑战。
Review of MEMS Speakers for Audio Applications
- 按驱动原理分类 MEMS 扬声器，包括电磁、压电和静电三种类型
- 压电型通过直接气流驱动，在小型化与效率上表现最优
- 适合追求极致小型化音频设备的研发人员参考
微机电系统（MEMS）扬声器是传统音圈扬声器的紧凑可扩展替代方案，可通过精密半导体制造实现更优音质。本文综述了1990至2025年间的研究进展，涵盖基于超声脉冲和热声发声的技术，按驱动原理将MEMS扬声器分为电磁、压电和静电三类。性能指标对比显示，采用直接空气位移的压电型MEMS在微型化与能效方面占据主导地位。文章还指出未来研究挑战，并识别出有望实现全频段音频性能的潜在技术方向。创新路径的探索或推动纯MEMS扬声器的宽带普及。
原文摘要 · Abstract (English)
Microelectromechanical systems (MEMS) speakers are compact, scalable alternatives to traditional voice coil speakers, promising improved sound quality through precise semiconductor manufacturing. This review provides an overview of the research landscape, including ultrasound pulse-based and thermoacoustic sound generation, classifying MEMS speakers by actuation principle: electrodynamic, piezoelectric, and electrostatic. A comparative analysis of performance indicators from 1990-2025 highlights the dominance of piezoelectric MEMS with direct air displacement, focusing on miniaturization and efficiency. The review outlines upcoming research challenges and identifies potential candidates for achieving full-spectrum audio performance. A focus on innovative approaches could lead to wideband adoption of MEMS-only speakers.
Thank you to arXiv for use of its open access interoperability. PaperDance 不是 arXiv 官方产品；中文卡片由大模型生成，请以原文为准。