arXiv:2512.23742cs.SEcs.AI2025-12中稿 · DATE 2026

用大模型自动生成半导体器件代码,4小时完成人需7天的工作

AgenticTCAD: A LLM-based Multi-Agent Framework for Automated TCAD Code Generation and Device Optimization

  • 构建多智能体系统,通过自然语言指令自动设计与优化器件
  • 在2纳米晶体管上4.2小时内达成国际器件路线图标准
  • 适合芯片设计与仿真领域研究者快速原型验证

随着先进制程节点持续演进,设计-工艺协同优化(DTCO)愈发关键,高效器件设计与优化成为必要。然而,在TCAD仿真领域,开源资源匮乏限制了语言模型生成有效代码的能力。为此,我们构建了一个由专家整理的开源TCAD数据集,并微调出面向TCAD代码生成的专用模型。在此基础上,提出AgenticTCAD——一个以自然语言驱动的多智能体框架,实现端到端的自动化器件设计与优化。在2纳米片式晶体管(NS-FET)设计验证中,AgenticTCAD仅用4.2小时即达到国际器件与系统路线图(IRDS-2024)要求,而人类专家使用商用工具需7.1天。

原文摘要 · Abstract (English)

With the continued scaling of advanced technology nodes, the design-technology co-optimization (DTCO) paradigm has become increasingly critical, rendering efficient device design and optimization essential. In the domain of TCAD simulation, however, the scarcity of open-source resources hinders language models from generating valid TCAD code. To overcome this limitation, we construct an open-source TCAD dataset curated by experts and fine-tune a domain-specific model for TCAD code generation. Building on this foundation, we propose AgenticTCAD, a natural language - driven multi-agent framework that enables end-to-end automated device design and optimization. Validation on a 2 nm nanosheet FET (NS-FET) design shows that AgenticTCAD achieves the International Roadmap for Devices and Systems (IRDS)-2024 device specifications within 4.2 hours, whereas human experts required 7.1 days with commercial tools.

半导体大模型自动化TCAD

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