提升晶圆缺陷检测对比度,让微小瑕疵更易被发现。
Multi-Period Texture Contrast Enhancement for Low-Contrast Wafer Defect Detection and Segmentation
- 通过多尺度重加权与频域扰动建模,保留微缺陷高频细节。
- 在真实工业数据上实现mAP50-95提升8.3%,召回率提高7.7%。
- 专为周期性背景中的低对比度缺陷设计,适合高精度制造质检。
晶圆缺陷分割对半导体良率优化至关重要,但微尺度异常与高度周期性、强干扰背景纹理之间存在固有矛盾。现有深度学习方法常因下采样导致特征稀释,且缺乏显式机制分离低对比度缺陷与工艺噪声。为此,本文提出TexWDS框架,融合多尺度特征保持与频域扰动建模。核心创新包括:(1) 多尺度感受野重加权策略,缓解混叠效应,保留微缺陷高频信息;(2) 多尺度统一语义增强器(MUSE),结合局部外观与全局上下文编码,提升低可见区域特征可区分性;(3) 可插拔的多周期纹理对比增强(MPTCE)模块,通过频域建模纹理扰动,显式分离非周期性异常与结构化背景,增强伪装缺陷对比度。在真实工业数据集上的大量实验表明,TexWDS达到新基准,相比基线在mAP50-95上提升8.3%,召回率提高7.7%,误报率降低约8.6%。结果证明该框架在处理复杂周期模式下的鲁棒性,适用于高精度制造检测场景。
原文摘要 · Abstract (English)
Wafer defect segmentation is pivotal for semiconductor yield optimization yet remains challenged by the intrinsic conflict between microscale anomalies and highly periodic, overwhelming background textures. Existing deep learning paradigms often falter due to feature dilution during downsampling and the lack of explicit mechanisms to disentangle low-contrast defects from process-induced noise. To transcend these limitations, we propose TexWDS, a texture-aware framework that harmonizes multi-scale feature retention with frequency-domain perturbation modeling. Our methodology incorporates three strategic innovations: (1) A Multi-scale Receptive Field Reweighting strategy is introduced to mitigate aliasing effects and preserve high-frequency details of micro-defects often lost in standard pyramidal architectures. (2) The Multi-scale Unified Semantic Enhancer (MUSE) integrates local appearance with global context encoding, effectively enhancing feature discriminability in low-visibility regions. (3) Crucially, we design a plug-and-play Multi-Periodic Texture Contrast Enhancement (MPTCE) module. By modeling texture disruptions in the frequency domain, MPTCE explicitly decouples non-periodic anomalies from structured backgrounds, boosting contrast for camouflaged defects. Extensive experiments on real-world industrial datasets demonstrate that TexWDS achieves a new state-of-the-art, surpassing the baseline by 8.3% in mAP50-95 and 7.7% in recall, while reducing the false positive rate by approximately 8.6%. These results underscore the framework's robustness in handling complex periodic patterns and its suitability for high-precision manufacturing inspection.
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