arXiv:2603.16548cs.CRcs.CV2026-03

用通用模型精准分割芯片金属线,无需为每块芯片重调参数。

SAMSEM -- A Generic and Scalable Approach for IC Metal Line Segmentation

  • 基于SAM2构建多尺度分割框架,适应不同分辨率与放大倍数的电子显微图像。
  • 引入拓扑损失,在保持电路连通性的同时降低0.72%的误检率。
  • 在14款芯片上训练后,对未见芯片仍保持5.53%以下错误率,适合硬件可信验证场景。

随着全球供应链的普及,硬件组件的安全性在密码学及高风险场景中备受关注。通过扫描电子显微镜(SEM)图像识别集成电路(IC)中的金属线,是验证制造于不可信环境中的芯片是否含有恶意电路的关键步骤。由于制造工艺和技术差异,传统方法需针对每款IC调整参数与算法,且单一模型难以跨芯片泛化。为此,本文提出SAMSEM,将Meta的Segment Anything Model 2(SAM2)适配至IC金属线分割任务。我们设计了多尺度分割策略,可处理不同尺寸、分辨率与放大倍数的SEM图像;并引入拓扑结构损失,使分割更注重电学连通性而非像素级精度。基于超参优化,我们在涵盖14款不同IC、48个金属层的前所未有的大尺度数据集上微调模型。在7个已知IC上微调后,模型在同源图像上误差率低至0.72%;对剩余7个未见IC,误差率仍低于5.53%;在全部14个IC上训练后,误差率进一步降至0.62%。结果表明,SAMSEM是一种高效可靠的通用工具,显著推进了后制造阶段芯片验证中的金属线分割技术边界。

原文摘要 · Abstract (English)

In light of globalized hardware supply chains, the assurance of hardware components has gained significant interest, particularly in cryptographic applications and high-stakes scenarios. Identifying metal lines on scanning electron microscope (SEM) images of integrated circuits (ICs) is one essential step in verifying the absence of malicious circuitry in chips manufactured in untrusted environments. Due to varying manufacturing processes and technologies, such verification usually requires tuning parameters and algorithms for each target IC. Often, a machine learning model trained on images of one IC fails to accurately detect metal lines on other ICs. To address this challenge, we create SAMSEM by adapting Meta's Segment Anything Model 2 (SAM2) to the domain of IC metal line segmentation. Specifically, we develop a multi-scale segmentation approach that can handle SEM images of varying sizes, resolutions, and magnifications. Furthermore, we deploy a topology-based loss alongside pixel-based losses to focus our segmentation on electrical connectivity rather than pixel-level accuracy. Based on a hyperparameter optimization, we then fine-tune the SAM2 model to obtain a model that generalizes across different technology nodes, manufacturing materials, sample preparation methods, and SEM imaging technologies. To this end, we leverage an unprecedented dataset of SEM images obtained from 48 metal layers across 14 different ICs. When fine-tuned on seven ICs, SAMSEM achieves an error rate as low as 0.72% when evaluated on other images from the same ICs. For the remaining seven unseen ICs, it still achieves error rates as low as 5.53%. Finally, when fine-tuned on all 14 ICs, we observe an error rate of 0.62%. Hence, SAMSEM proves to be a reliable tool that significantly advances the frontier in metal line segmentation, a key challenge in post-manufacturing IC verification.

芯片安全图像分割泛化能力SEM分析

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