arXiv:2606.08161cs.LGcs.AR2026-06中稿 · the 63rd ACM/IEEE …

用Transformer学习电容矩阵,跨工艺节点迁移能力强。

AttentionCap: Transformer Based Capacitance Matrix Learning Toward Full-Chip Extraction

论文配图:AttentionCap: Transformer Based Capacitance Matrix Learning Toward Full-Chip Extraction
图 1 · 摘自论文原文
  • 基于注意力机制设计专用Transformer,支持多层多工艺节点
  • 在未见真实设计上自耦电容误差仅0.67%/3.99%,较基线低4.6~5.7倍
  • 仅需5千样本即可快速适配新工艺,适合工业级EDA流程

随着先进制程下规则匹配的电容提取精度难以维持,基于深度学习的2D电容模型成为趋势。但现有MLP与CNN方法受限于固定金属层组合和特定工艺节点,实用性不足。本文提出AttentionCap,一种面向电容矩阵学习的定制化Transformer,包含格拉姆表示框架、物理对齐的对称注意力输出层及新型归一化拉普拉斯损失,并引入工艺节点嵌入实现多节点学习。在合成数据上训练后,AttentionCap在未见真实设计的多层多工艺设置下,自电容与耦合电容误差分别为0.67%和3.99%,优于CNN-Cap基线4.6倍与5.7倍,且推理速度提升192倍。预训练模型仅用5000样本、4000次微调即可准确迁移至新工艺节点。具备高精度与强泛化能力,可直接用于现代EDA工作流。代码与数据见https://github.com/THU-numbda/AttentionCap。

原文摘要 · Abstract (English)

As capacitance extraction accuracy of rule-based pattern matching becomes difficult to sustain at advanced nodes, a growing trend emerges to develop deep-learning-based 2D capacitance models. However, existing MLP- and CNN-based methods constrain their input to fixed metal-layer combinations in a specific process node, limiting their usability in practice. Recognizing the inherent similarity between capacitance matrix and the prevailing attention mechanism, we propose AttentionCap, a customized Transformer for capacitance matrix learning, with a Gram representation framework, a physics-aligned symmetric-attention output layer, and a novel normalized Laplacian loss. We also introduce a process-node embedding to enable multi-node learning. Trained on synthetic data, AttentionCap attains 0.67\%/3.99\% self/coupling-capacitance error on unseen real designs under a multi-layer and multi-node setting, surpassing the CNN-Cap baseline with 4.6$\times$/5.7$\times$ lower self/coupling error and 192$\times$ faster inference speed. A pretrained AttentionCap accurately transfers to an unseen node with only 5K samples and 4K finetuning steps. With sufficient accuracy on unseen real designs and strong transferability to new process nodes, AttentionCap offers highly practical value for modern EDA workflows. Code and data are available at https://github.com/THU-numbda/AttentionCap.

电容提取TransformerEDA迁移学习

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