arXiv:2606.11247cs.LGcs.AI2026-06

让生成模型从源头就满足物理约束,提升芯片制造的可靠性。

Physics-informed generative AI for semiconductor manufacturing: Enforcing hard physical constraints in generative models by construction

  • 通过构建物理约束直接融入模型架构,而非事后过滤无效结果。
  • 在光刻、工艺模拟等场景中,生成结果符合实际物理规律,避免不可用设计。
  • 适合芯片制造、物理仿真等对真实性要求极高的工程领域研究者。

生成模型越来越多地用于物理系统的设计、数据和控制策略生成,但许多系统受硬性物理约束支配,而非感知合理性。半导体制造是一个严峻考验:生成的掩模、版图、合成缺陷数据和工艺配方必须遵守光刻、传输、反应及器件物理约束,因为物理无效的样本不仅质量差,更无法使用。本文认为,半导体制造揭示了一个更广泛的计算科学挑战:面向约束物理领域的生成人工智能必须从构造上实现物理感知,而非仅靠事后过滤。我们综述了新兴的架构工具包,包括物理信息扩散模型、偏微分方程约束变分模型、神经算子先验和守恒律尊重型生成网络,并展示了其与可微光刻、TCAD、工艺仿真及自主实验的关联。识别出生成模型与物理模拟器之间的四种集成模式,提出以物理保真度基准、可微模拟器基础设施和多模态物理设计基础模型为核心的科研议程。核心主张是分析性的:当物理有效性是成功的决定性标准时,从构造上强制物理一致性的架构应优于事后筛选的模型,而晶圆厂正是这一区别的最尖锐体现。

原文摘要 · Abstract (English)

Generative models are increasingly used to propose designs, data, and control actions for physical systems, yet many such systems are governed by hard physical constraints rather than by perceptual plausibility. Semiconductor manufacturing provides a demanding test case: generated masks, layouts, synthetic defect data, and process recipes must obey lithography, transport, reaction, and device-physics constraints, because physically invalid samples are not merely low quality but unusable. This Perspective argues that semiconductor manufacturing exposes a broader computational-science challenge, namely that generative AI for constrained physical domains must be physics-informed by construction, not corrected only through post-hoc filtering. We survey the emerging architectural toolkit, including physics-informed diffusion, PDE-constrained variational models, neural-operator priors, and conservation-law-respecting generative networks, and show how it connects to differentiable lithography, TCAD, process simulation, and autonomous experimentation. We identify four integration patterns between generative models and physics-based simulators, and we propose a research agenda centered on physics-fidelity benchmarks, differentiable simulator infrastructure, and multimodal foundation models for physical design and manufacturing. The central claim is analytical rather than rhetorical: where physical validity is the binding criterion of success, architectures that enforce it by construction should be expected to outperform those that filter for it after the fact, and the fab is the setting where this distinction is sharpest.

生成模型物理约束芯片制造AI+制造

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