低成本自研旋涂仪集成光学测厚，实现软膜厚度精准控制。
Design and Fabrication of a Spin Coater with In-Situ Optical Measurement for Soft Thin Films
- 3D打印构建旋涂台，用激光位移传感器实现非接触式在线测厚。
- 实测厚度分辨率3.6~3.7微米，重复性达13微米，薄膜厚度误差小于9微米。
- 适合柔性电子、人工肌肉等对厚度敏感的软材料研究与制造。
旋涂法广泛用于聚合物和弹性体薄膜制备，但高柔顺材料的厚度验证仍面临挑战，因接触测量易引起形变，传统光学检测又成本高、复杂。在介电弹性体执行器（DEAs）等应用中，薄膜厚度直接影响机械与功能性能。本文设计并搭建了一款低成本、主要由3D打印构成的桌面型旋涂仪，集成低扰动光学厚度测量系统，可稳定制备50至300微米厚的薄膜，重复性控制在10微米内。通过四象限光电探测器追踪反射激光束位移实现原位测厚，避免显著形变。文中讨论了光学几何、传感器线性约束，并通过有限元分析进行结构验证。利用校准金属垫片实验验证，厚度分辨率达3.6~3.7微米，最佳测量重复性为13微米（95%置信区间）。平台可反复制备接近目标厚度的硅橡胶薄膜，误差小于9微米，证明低成本光学检测可融入简易旋涂系统，实现无需工业级设备的可控软膜制造。
原文摘要 · Abstract (English)
Spin coating is widely used for fabrication of thin polymer and elastomer films, yet reliable thickness verification of highly compliant materials remains challenging due to deformation from contact-based measurements and the cost and complexity of conventional optical metrology. Accurate thickness control is especially critical in soft elastomer applications such as dielectric elastomer actuators (DEAs), where mechanical and functional performance scales strongly with film thickness. This work presents a low-cost, primarily 3D-printed benchtop spin coater with an integrated, minimally deforming optical thickness measurement system for soft-film fabrication workflows. The system is designed to manufacture films between 50 and 300 microns thick with repeatability within 10 microns. Thickness is measured in-situ by tracking displacement of a reflected laser beam via quadrant photodetector, avoiding significant deformation. Optical geometry, sensor linearity constraints, and structural validation via finite element analysis are discussed. Experimental validation using calibrated metal shims demonstrated a thickness resolution of 3.6-3.7 microns and best-case measurement repeatability of 13 microns (95 percent confidence interval). The platform repeatably produced silicone films within 9 microns of target thickness, demonstrating that accessible optical metrology can be integrated into a low-cost spin coating system for practical, thickness-controlled fabrication of compliant thin films without specialized industrial instrumentation.
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