用纳米机电系统实现硬件安全，防篡改且低功耗。
Nanoelectromechanical Systems (NEMS) for Hardware Security in Advanced Packaging
- 利用纳米机械随机性构建物理不可克隆函数
- 支持抗逆向工程与环境干扰的可靠认证
- 适合军工、航天等高安全场景部署
随着半导体制造和先进封装中的硬件安全威胁日益严峻，亟需新型物理机制应对篡改、伪造和供应链渗透等攻击。本文提出纳米机电系统（NEMS）作为新兴的硬件安全原语，可在器件层面实现物理保证、篡改检测与身份认证。通过基于NEMS的物理不可克隆函数（PUFs）、形状记忆材料、共振指纹及物理解锁架构，这些系统具备对逆向工程、旁道攻击和环境退化的强韧性。借助机械不确定性和制造引起的纳米级变异，NEMS技术提供了一种物理坚固且低功耗的替代方案，可无缝集成至标准半导体工艺流程，为国防、航空航天、关键基础设施和消费电子等领域提供可扩展、可验证的安全部署路径。
原文摘要 · Abstract (English)
As hardware security threats escalate across semiconductor manufacturing and advanced packaging, there is a growing need for novel physical mechanisms to counter sophisticated attacks such as tampering, counterfeiting, and supply chain infiltration. This paper presents Nanoelectromechanical Systems (NEMS) as an emerging class of hardware security primitives that enable physical assurance, tamper detection, and authentication at the device level. Leveraging mechanisms such as NEMS-based Physically Unclonable Functions (PUFs), shape memory materials, resonance-based fingerprints, and physical unlocking architectures, these systems offer enhanced resilience to reverse engineering, side-channel attacks, and environmental degradation. By harnessing mechanical unpredictability and fabrication-induced nanoscale variability, NEMS technologies introduce a physically robust and low-power alternative to conventional digital security methods. Their seamless integration into standard semiconductor workflows paves the way for scalable, verifiable, and secure solutions across defense, aerospace, critical infrastructure, and consumer electronics.
Thank you to arXiv for use of its open access interoperability. PaperDance 不是 arXiv 官方产品；中文卡片由大模型生成，请以原文为准。