用自监督生成布局,让AI自动修复先进制程的布图违规问题。
SCALE: Self-Supervised Constraint-Aware Layout GEneration for Local P&R DRV Fixing at Advanced Nodes

- 将多层版图转为文本,用语言模型重建被遮盖的图形。
- 生成含违规的版图对,提升现有工具修复成功率12%至25%。
- 适合先进制程设计团队解决复杂布图规则冲突问题。
随着半导体制造进入亚2纳米节点,局部布局布线(P&R)设计规则违反(DRV)修复面临规则交互复杂、多层布线密集及代工厂特定约束等挑战。尽管大语言模型(LLMs)在EDA脚本与文档方面表现优异,但其在视觉版图理解上的应用仍处于空白:从版图图像诊断DRC违规需精确几何推理和代工厂特有规则知识,而通用视觉语言模型(VLM)训练中缺乏此类信息。我们提出SCALE框架,包含自监督版图生成阶段,用于先进节点的局部DRV修复。多层版图几何被序列化为结构化文本,微调后的语言模型仅依赖周围后端金属层(BEOL)上下文重建被随机掩码的多边形,无需违规标签。推理时,自然语言规则约束与高温采样引导生成多样且易出错的版图变体,经工业级签核DRC检查器验证后形成带标注的版图-违规对,用于微调领域适配的DRC-VLM。该VLM提供规则感知的几何指导,使最先进的修复代理在100个真实亚2纳米案例上(涵盖包围、间距、宽度、颜色间距违规)的求解率提升12%至25%(最高达97%)。
原文摘要 · Abstract (English)
As semiconductor manufacturing advances toward sub-2nm nodes, local place-and-route (P&R) design-rule violation (DRV) fixing is increasingly limited by complex rule interactions, dense multi-layer routing geometries, and foundry-specific constraints. While Large Language Models (LLMs) have recently demonstrated strong capabilities in EDA scripting and documentation, their application to visual layout understanding remains largely unexplored: diagnosing DRC violations from layout imagery demands precise geometric reasoning and foundry-specific rule knowledge absent from general-purpose VLM training. We propose SCALE, a framework with a self-supervised layout-generation stage for local DRV fixing at advanced nodes. Multi-layer layout geometry is serialized into structured text, and a fine-tuned language model learns to reconstruct randomly masked polygons from surrounding BEOL context alone without violation labels. At inference, natural-language rule constraints and high-temperature sampling steer generation toward diverse, violation-prone layout variants validated by an industrial signoff DRC checker, producing DRC-annotated layout--violation pairs used to fine-tune a domain-adapted DRC-VLM. This VLM provides rule-aware geometric guidance for local DRV repair, boosting state-of-the-art agents' solve rates by +12--25% (up to 97%) on 100 real sub-2nm cases spanning enclosure, spacing, width, and color-spacing violations.
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