用商用麦克风芯片实现超声波发射，打造紧凑型定向声源。
MEMS Microphones as Ultrasonic Transducers: Nonlinear Electrostatic Actuation and a Parametric Array Prototype
- 利用麦克风膜片的非线性电驱动特性实现超声发射。
- 28个芯片阵列在83与93kHz驱动下产生10kHz定向声波。
- 适用于低成本超声成像与定向音频系统设计。
本文研究商用微型电容式MEMS麦克风芯片在非线性吸合与弹跳驱动下作为空气耦合超声发射器的性能，并演示了一个紧凑型参量阵原型。单个芯片即可产生显著的膜片位移和可测的空气中超声压强。由28个芯片组成的阵列在83 kHz和93 kHz驱动下，生成频率为10 kHz的定向声波分量。实验结果与解析辐射理论及有限元建模进行对比，讨论了孔径、填充因子、器件均匀性及接收端非线性的影响。
原文摘要 · Abstract (English)
This paper investigates commercial-style capacitive MEMS microphone dies as air-coupled ultrasonic transmitters under nonlinear pull-in and snap-back actuation and demonstrates a compact parametric-array prototype. A single die produces large diaphragm displacement and measurable ultrasonic pressure in air. A 28-die array driven at 83 and 93 kHz generates a directional component at the 10 kHz difference frequency. Measurements are compared with analytical radiation theory and finite-element modeling, and the effects of aperture, fill factor, device uniformity, and receiver nonlinearity are discussed.
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