arXiv:2608.09104cond-mat.mtrl-scics.LG2026-08

让扫描探针显微镜自动选择测量位置和方式,提升效率与精度。

Multitask Scanning Probe Microscopy

  • 用多任务高斯过程动态规划测量点和测量模式。
  • 在铝钪氮化物晶圆上实现快速非接触与慢速接触测量协同。
  • 适合需要多模态高效表征的材料研发与半导体检测场景。

扫描探针显微镜可实现对材料结构、电学、机电、磁性及力学性质的纳米级探测。随着其在晶圆级表征和组合材料探索中的应用增加,如何在大空间范围内高效分配测量任务成为关键挑战。尤其当不同测量模态耗时不同且易造成探针或样品损伤时,对空间网格进行全模态遍历测量已不现实。本文提出多任务扫描探针显微技术,一种实时闭环工作流:多任务高斯过程学习空间分布与跨模态关系,并自主决定下一测量位置与实验协议。该方法在自动化大样本原子力显微镜上实现,以敲击模式和双频共振追踪(DART)在成分梯度AlScN晶圆上验证。初始成对测量建立任务间关联后,非共点测量用于同步更新各响应图谱。该流程将主动学习从空间采样扩展至测量模态的自主分配,为快速弱扰动成像与慢速接触式电学、机电、磁性或谱学测量的融合提供基础。

原文摘要 · Abstract (English)

Scanning probe microscopy provides nanoscale access to structural, electrical, electromechanical, magnetic, and mechanical properties of materials. Its increasing use for wafer-scale characterization and combinatorial materials exploration creates a need to distribute measurements efficiently across large spatial domains. This is particularly important when available modalities differ in acquisition time and potential for tip and sample damage, making exhaustive multimodal mapping over spatial grids impractical. Here, we demonstrate multitask scanning probe microscopy, a live, closed-loop workflow in which a multitask Gaussian process learns spatial and cross-modal relationships and autonomously selects both the next measurement location and the next experimental protocol. The approach is implemented on an automated large-sample atomic force microscope and demonstrated on a composition-spread AlScN wafer using tapping-mode and Dual AC Resonance Tracking (DART) measurements. Paired initial measurements establish the relation between the tasks, after which noncoincident measurements are used to update both response landscapes. The resulting workflow extends active learning in scanning probe microscopy from spatial sampling to autonomous allocation of measurement modalities and provides a basis for combining rapid, weakly perturbative imaging with slower contact, electrical, electromechanical, magnetic, or spectroscopic measurements.

扫描探针多任务学习自动化表征材料科学

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